Zhao, Jingjing; Fan, Xinye; Fang, Wenjing; Xiao, Wenxing; Sun, Fangxin; Li, Chuanchuan; Wei, Xin; Tao, Jifang; Wang, Yanling; Kumar, Santosh Source: Sensors, v 24, n 12, June 2024; E-ISSN: 14248220; DOI: 10.3390/s24123943; Article number: 3943; Publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Author affiliation:

School of Physics Science and Information Engineering, Liaocheng University, Liaocheng; 252000, China

Shandong Provincial Key Laboratory of Optical Communication Science and Technology, Liaocheng; 252000, China

Liaocheng Key Laboratory of Industrial-Internet Research and Application, Liaocheng; 252000, China

Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China

College of Information Science and Engineering (ISE), Shandong University, Qingdao; 266237, China

Ningbo Xingke Metal Materials Co., Ltd., Ningbo; 315000, China

Department of Electronics and Communication Engineering, Koneru Lakshmaiah Education Foundation, Vaddeswaram, Guntur; 522302, India

Abstract:

This article shows an all-dielectric metasurface consisting of "H"-shaped silicon disks with tilted splitting gaps, which can detect the temperature and refractive index (RI). By introducing asymmetry parameters that excite the quasi-BIC, there are three distinct Fano resonances with nearly 100% modulation depth, and the maximal quality factor (Q-factor) is over 10. The predominant roles of different electromagnetic excitations in three distinct modes are demonstrated through near-field analysis and multipole decomposition. A numerical analysis of resonance response based on different refractive indices reveals a RI sensitivity of 262 nm/RIU and figure of merit (FOM) of 2183 RIU. This sensor can detect temperature fluctuations with a temperature sensitivity of 59.5 pm/k. The proposed metasurface provides a novel method to induce powerful TD resonances and offers possibilities for the design of high-performance sensors.