A Switchable High-Performance RF-MEMS Resonator with Flexible Frequency Generations
Author(s): Chen, ZJ (Chen, Zeji); Kan, X (Kan, Xiao); Yuan, Q (Yuan, Quan); Wang, TY (Wang, Tianyun); Yang, JL (Yang, Jinling); Yang, FH (Yang, Fuhua)
Source: SCIENTIFIC REPORTS Volume: 10 Issue: 1 Article Number: 4795 DOI: 10.1038/s41598-020-61744-2 Published: MAR 16 2020
Abstract: Resonators with multi-frequency generations at the device-level are highly desired in the future multi-band, reconfigurable, and compact wireless communications. In this work, a switchable radio frequency micro-electro-mechanical system (RF-MEMS) resonator with multiple electrodes is presented. The resonator is designed to operate at the whispering gallery modes (WGMs). Simultaneous excitations of the second to seventh modes with high Q values are implemented within a single device using a pair of electrodes for driving and sensing. For effective multi-frequency excitations, the electrode span angle is optimized. The frequencies of the 37 mu m and 18 mu m-radius resonators range from 53MHz to 176MHz and 112MHz to 366MHz, respectively. The Q values in each mode are over 10(4). Moreover, with the multi-electrode configurations, the specific mode can be enhanced with other modes suppressed. A more than 6dB improvement of the spectrum peak is realized and the high Q values are maintained. A comprehensive theory is built up to clarify the driving/sensing principles under different electrode configurations. Furthermore, the air damping is found to have a significant effect on Q values for resonator with high stiffness vibrating in all the WGMs. The Q values in vacuum have at least two times improvement. The high-performance switchable resonator could dramatically reduce the power consumption, simplify the processing circuits, and occupy less footprint, which has great potential applications in future advanced RF front end systems.
Accession Number: WOS:000562124800004
PubMed ID: 32179843